Mobile Particle Forensics Robot
A cobot that reaches inside semiconductor equipment to find where contamination starts
Particle contamination inside a wafer inspector is invisible until it kills yield, and finding its source means a human with a flashlight and a hunch. This is a UR5e-class arm on a rail base carrying a UV inspection head, with an LLM agent that proposes inspection sequences and executes them behind human confirm-gates.
- UR5e / URScript
- ROS 2 Jazzy
- MoveIt 2
- URSim (PolyScope)
- Gazebo
- +6